| Name | Concentration range (%) |
Balance gas | Pressure(Mpa) | Volume(L) | Valve |
| Silane gas mixtures | 0.5-50 | Ar、N2、He、H2 | 5-12 | 4-47 | It can be customized according to user requirements. |
| Phosphine gas mixtures | 5ppm-23 | Ar、N2、He、H2 | 5-12 | 0.7-17 | |
| Borane gas mixtures | 5ppm-10 | Ar、N2、He、H2 | 5-10 | 4-17 | |
| Arsine gas mixtures | 5ppm-5 | Ar、N2、He、H2 | 5-12 | 0.7-17 | |
| Hydrogen selenide mixtures | 10ppm-5 | Ar、N2、He、H2 | 5-12 | 4-17 | |
| Silicoethane | 5ppm-2 | Ar、N2、He、H2 | ≥5 | 0.7-17 | |
| Germane | 5ppm-0.5 | Ar、N2、He、H2 | ≥5 | 0.2-17 |
Package: 1-40 （L） in cylinder
Filling pressure: 9.5MPa,
Components and concentration range can be prepared in accordance with customer requirements.
Address: No.58 Shenglong Road, Jiufu Industry Park, Jiuting Town, Songjiang District, Shanghai 201615, China
TEL: +86-021-37820693
FAX: +86-021-37820690
ZIP：201615
E-mail:info@gas-sh.com
WETRY WECHAT
