| Name | Molecular formulas | Purity(%) | Impurities（ppm） |
| Neon | Ne | 99.99% | N2≤100 CO2≤1 CH4≤1 |
| 99.999% | O2≤1, N2≤5, H2O≤2, He≤10 | ||
| Krypton | Kr | 99.95% | Xe≤50 N2≤1.5 O2+Ar≤5 H2≤2 CO2≤1 CO≤1 CH4≤1 H2≤3 |
| 99.99% | N2≤20 O2+Ar≤5 H2≤2 total carbon≤1 H2O≤3 Xe≤50 total impurities≤100 | ||
| 99.995% | N2≤10 O2+Ar≤2 H2≤1 total carbon≤1 H2O≤3 Xe≤3 total impurities≤10 | ||
| 99.999% | N2≤3 O2+Ar≤2 H2≤0.5 total carbon≤1 H2O≤2.6 Xe≤4 total impurities≤10 | ||
| 99.9999% | Xe≤0.01, O2≤0.08, N2≤0.43, CO2≤0.12, CH4≤0.1, H2O≤0.1, CF4≤0.01, C4F6≤0.01 | ||
| Xenon | Xe | 99.95% | CO2≤5 CH4≤5 CH4≤1 N2O≤5 H2O≤5 |
| 99.99% | N2≤20 O2+Ar≤5 H2≤2 total carbon≤3 H2O≤3 Kr≤30 N2O≤1 total impurities≤100 | ||
| 99.995% | N2≤10 O2+Ar≤4 H2≤1 total carbon≤2 H2O≤3 Kr≤30 N2O≤1 total impurities≤100 | ||
| 99.999% | N2≤1 O2+Ar≤2 H2≤0.5 total carbon≤1 H2O≤2.5 Kr≤5 N2O≤0.5 total impurities≤10 | ||
| 99.9999% |
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