1、High purity liquid oxygen
Purity | Impurity content | Ar | N2 | CH4 | CO2 |
≥99.995% | ppm | ≤5 | ≤20 | ≤2 | ≤1 |
2、Liquid argon
Name | Purity | Impurity content | N2 | O2 | H2 | Total carbon |
High purity liquid argon | ≥99.999% | ppm | ≤4 | ≤2 | ≤1 | ≤2 |
Pure liquid argon | ≥99.99% | ppm | ≤50 | ≤10 | ≤5 | ≤10 |
3、Liquid nitrogen
Name | Purity | Impurity content | O2 |
High Purity Liquid nitrogen | ≥99.999% | ppm | ≤3 |
Pure Liquid nitrogen | ≥99.99% | ppm | ≤50 |